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Wednesday, September 22, 2010

Conformal Dielectric

Conformal Dielectric

What is the Conformal Dielectric ? It a normal dielectric layer but with certain properties / Parameters. Like
  • It's surround a particular layer either conductor or other Dielectric. It means it will not be in complete design. You can find only at that place where it's corresponding layer present. Like POLY, M1 , M2 etc.
  • It will have at least one of the below parameter (Check below figure for understanding of these parameter)
    • Side Thickness
    • Top Thickness
    • Bottom Thickness

Below diagrams can help you to understand the concept of conformal Dielectric understand very well. I am sure no need of any explanation after that.

  • Associated Conductor is M1.
  • Side Expand of Dielectric around M1 - Means This Dielectric is Conformal.
  • Top Expand (thickness) of Dielectric Around M1 - Means it's a Conformal Dielectric.
  • Bottom expand (thickness) of Dielectric around M1 - Means It's a Conformal Dielectric.

Note :
  • Associated Conductor is M1.
  • I have tried to just represent either side presence or bottom presence or top presence of Conformal Dielectric to show that this can be the Structure.

  • Associated Conductor is M1 for DEL_a1, DEL_b1 and DEL_c1.
  • For other Dielectric (DEL_a2, DEL_a3, DEL_b2, DEL_c2) associated layer is Dielectric. So these are also Conformal dielectric but around previous(other Dielectric).
  • Calculation the Side thickness, bottom thickness and top thickness in case it's associated with other dielectric is as per the Figure shown above but how these are modeled in different EDA technology file, depends on their modeling methodology.

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